maximus 806

The maximus 806 is a fully automatic and programmable cassette-to-cassette micro-cluster system. It can be equipped with modules as coater, developer, cleaning, HMDS vapor primer, hotplates and coolplates for wafer sizes from Ø 4” up to Ø 8”. Two robots, one for the I/O handling and one for the process-module handling are able to handle even fragile materials very gently.

maximus 804 lift-off

Lift-Off Cluster containing 3 process modules The MAXIMUS 804 Lift-Off is a fully automatic and programmable Cassette-to-Cassette Micro-Cluster System. It can be equipped with modules as such Immersion Batch Soak, Lift-Off (Single Wafer), and Post cleaning for wafer sizes from Ø 2” up to Ø 8”.

maximus 804

The maximus 804 is a fully automatic and programmable cassette-to-cassette micro-cluster system. It can be equipped with modules as coater, developer, cleaning, HMDS vapor primer, hotplates and coolplates for wafer sizes from Ø 2” up to Ø 8” and substrates from 2”x 2” up to 6”x 6”.

maximus 802

maximus 802 is a fully automatic and programmable cassette-to-cassette micro-cluster system. It can be equipped with modules as coater, developer, cleaning, HMDS vapor primer, hotplates and coolplates for wafer sizes from Ø 2” up to Ø 8” and substrates from 2”x 2” up to 6”x 6”.

Electro Plating -System

Electrochemical, Fully automatic, Industrial grade handling system, Product agitation, electro plating, electroless plating, plating equipment, plating System

Electroless Plating-System

Electroless Plating-System, fully automated handling, Closed loop replenishment for electrolytes / Integrated waste water treatment