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DOMINUS Coater, OPTIcoat ST30i is a new and innovative spray coating system with a revolutionary nozzle concept. The patent pending micro spray nozzle allows, together with a closed process chamber and process approved exhaust system, uniform coatings over high topography surfaces. |
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The DOMINUS Coater, OPTIcoat ST22i is a new and innovative spray coating system with a revolutionary nozzle concept, equipped with an integrated hotplate. The patent pending micro spray nozzle allows, together with a closed process chamber and process approved exhaust system, uniform coatings over high topography surfaces. |
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The DOMINUS Coater, OPTIcoat ST20i is a new and innovative spray coating system with a revolutionary nozzle concept. The patent pending micro spray nozzle allows, together with a closed process chamber and process approved exhaust system, uniform coatings over high topography surfaces. |
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The maximus 806 is a fully automatic and programmable cassette-to-cassette micro-cluster system. It can be equipped with modules as coater, developer, cleaning, HMDS vapor primer, hotplates and coolplates for wafer sizes from Ø 4” up to Ø 8”. Two robots, one for the I/O handling and one for the process-module handling are able to handle even fragile materials very gently.
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The maximus 804 is a fully automatic and programmable cassette-to-cassette micro-cluster system. It can be equipped with modules as coater, developer, cleaning, HMDS vapor primer, hotplates and coolplates for wafer sizes from Ø 2” up to Ø 8” and substrates from 2”x 2” up to 6”x 6”. |
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