Lift-Off Cluster containing 3 process modules
The MAXIMUS 804 Lift-Off is a fully automatic and programmable Cassette-to-Cassette Micro-Cluster System. It can be equipped with modules as such Immersion Batch Soak, Lift-Off (Single Wafer), and Post cleaning for wafer sizes from Ø 2” up to Ø 8”. A precise and high speed robot, located in the center of the micro-cluster, is able to handle even fragile materials very gently.
This system offers manufacturers a maximum flexibility in finding exactly the best configuration for their process needs and provides excellent results in terms of quality and repeatability.
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